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Van Haver, S. (author), Janssen, O.T.A. (author), Braat, J.J.M. (author), Janssen, A.J.E.M. (author), Urbach, H.P. (author), Pereira, S.F. (author)
In this paper we introduce a new mask imaging algorithm that is based on the source point integration method (or Abbe method). The method presented here distinguishes itself from existing methods by exploiting the through-focus imaging feature of the Extended Nijboer-Zernike (ENZ) theory of diffraction. An introduction to ENZ-theory and its...
conference paper 2008
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Janssen, O.T.A. (author), Van Haver, S. (author), Janssen, A.J.E.M. (author), Braat, J.J.M. (author), Urbach, H.P. (author), Pereira, S.F. (author)
Results are presented of mask imaging using the Extended Nijboer-Zernike (ENZ) theory of diffraction. We show that the efficiency of a mask imaging algorithm, derived from this theory, can be increased. By adjusting the basic Finite Difference Time Domain (FDTD) algorithm, we can calculate the near field of isolated mask structures efficiently,...
conference paper 2008