Control for a Cryo Vibration Isolation Platform: Active vibration isolation in 3 degrees of freedom

Experiments in a closed-cycle cryostat suffer from vibrations caused by its pulse tube. To reduce this disturbance, a vibration isolator needs to be placed inside the cryostat. Since mechanical dampers do not work in a cryogenic environment, it requires active damping. This thesis is about the design of a controller for such an active vibration...

Development of a Quick Performance Assessment Method for Active Vibration Isolation Systems: Focusing on Photo-lithography Applications

The performance of high precision applications highly depend on the ability to reject mechanical disturbances. Extreme accuracies can only be achieved if the object can be isolated from its environment. Vibration isolation is the process of isolating an object from the source of vibration. In active vibration isolation, an entire instrument of...