Searched for: department:"ECTM"
(1 - 9 of 9)
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Qi, L. (author)
In this thesis, the research on silicon-based CMOS-compatible PureB technology was continued with the goal of enabling a PureB process module that could be added as a back-end module to wafers from a CMOS foundry. The properties of PureB layers deposited at low-temperature, particularly those deposited at 400°C were studied in more detail, among...
doctoral thesis 2016
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Fiorentino, G. (author)
The realization of efficient passive devices directly on chip represents one of the most intriguing challenges in IC fabrication processes. The performance of such devices are intrinsically determined by physical parameters that cannot be easily scaled, making the on-chip integration of such components a complex task to solve. To pursue the...
doctoral thesis 2015
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Moh, T.S.Y. (author)
In biosensing, nano-devices such as Silicon Nanowire Field Effect Transistors (SiNW FETs) are promising components/sensors for ultra-high sensitive detection, especially when samples are low in concentration or a limited volume is available. Current processing of SiNW FETs often relies on expensive and time-consuming nanolithography such as E...
doctoral thesis 2013
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Mimoun, B.A.Z. (author)
Being able to measure medical parameters directly inside the body in a minimally invasive way allows for a more accurate, faster, safer and cheaper diagnosis. A typical example can be found in the diagnosis of coronary artery diseases, where simultaneous measurement of intracoronary blood flow and pressure is needed. The aim of this Thesis is to...
doctoral thesis 2013
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Sakic, A. (author)
doctoral thesis 2012
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Iervolino, E. (author)
TGA is employed to determine degradation temperatures, absorbed moisture content, level of inorganic and organic components in milligram amount of materials. When such amounts of sample material are too dangerous to handle or not available MEMS TGA devices are a valuable option. To realize a MEMS TGA device a number of challenges arise: the...
doctoral thesis 2012
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Shen, C. (author)
In this thesis we described a new approach to design, fabricate, package and test three silicon based porous vertical structures for nanoparticle separations. These vertical structures stand in between two microfluidic channels. In these walls nano channels that connect the two adjacent microchannels are embedded. Fluid and small particles can...
doctoral thesis 2011
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Mele, L. (author), Santagata, F. (author), Panraud, G. (author), Morana, B. (author), Tichelaar, F.D. (author), Creemer, J.F. (author), Sarro, P.M. (author)
This paper presents a new process for the fabrication of MEMS-based nanoreactors for in situ atomic-scale imaging of nanoparticles under relevant industrial conditions. The fabrication of the device is completed fully at wafer level in an ISO 5 clean room and it is based on silicon fusion bonding and thin film encapsulation for sealed lateral...
journal article 2010
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La Spina, L. (author)
Nowadays, electrothermal effects (ET) are posing fundamental issues in nearly all branches of micro- and nano-electronics. Due to either a high power dissipation level or to the aggressive electrical isolation schemes adopted to increase the speed, both high and low power devices are affected by ET effects that limit their reliability and cause...
doctoral thesis 2009
Searched for: department:"ECTM"
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