Searched for: department%3A%22Microelectronics%22
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Dias, R.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author), Rocha, L.A. (author)
The pull-in time of electrostatically actuated parallel-plate microstructures enables the realization of a high-sensitivity accelerometer that uses time measurement as the transduction mechanism. The key feature is the existence of a metastable region that dominates pull-in behavior, thus making pull-in time very sensitive to external...
journal article 2012
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Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...
journal article 2012
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Rajaraman, V. (author), Sabageh, I. (author), French, P. (author), Pansraud, G. (author), Cretu, E. (author)
This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and...
journal article 2011
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Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...
journal article 2011
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Rocha, L.A. (author), Dias, R.A. (author), Cretu, E. (author), Mol, L. (author), Wolffenbuttel, R.F. (author)
This paper describes an electro-mechanical auto-calibration technique for use in capacitive MEMS accelerometers. Auto-calibration is achieved using the combined information derived from an initial measurement of the resonance frequency and the measurement of the pull-in voltages during device operation, with an estimation of process-induced...
journal article 2011
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Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)
This paper provides experimental validation of the predictions by two recent models for squeezed film damping in the free molecule regime. Measurements were carried out using a parallel-plate microstructure with a 2.29 ?m gap operated at pressures from 105 to 101 Pa (corresponding to Knudsen numbers from 0.03 to 300). Experiments are in good...
journal article 2009
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Mol, L. (author), Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)
Squeeze-film damping is highly inadequate in low-pressure systems or in systems where air pressure and/or gap dimensions are poorly defined. Input shaping has been used to circumvent the oscillations typically associated with under-damped mass-spring-damper systems and drastically decrease the settling time. The proposed method does not rely on...
journal article 2009
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Rocha, L.A. (author), Cretu, E. (author), Wolffenbuttel, R.F. (author)
journal article 2006
Searched for: department%3A%22Microelectronics%22
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