Dynamically balancing a flexure-based scan stage inside a scanning electron microscope

Delmic's SECOM platform integrates an optical microscope in a scanning electron microscope. A flexure based scan stage has been designed and produced to be used in the next generation of the SECOM platform. However, the reaction forces of the scan stage produce vibrations in the platform. These vibrations negatively affect the position accuracy...

Energy Based Error Formulation for Optimizing Compliant Joint Parallel Manipulators

The conversion of a Rigid Body Parallel Manipulator to a Compliant Joint Parallel Manipulator introduces compliance in the system. The configuration of the compliant manipulator will differ from the configuration described by the rigid-body kinematics due to the off-axis compliance, and hence off-axis deflections, of the Compliant Joints. In...

A Fully Compliant Force Balanced Oscillator