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Yuan, M. (author), Cohen, M.A. (author), Steele, G.A. (author)We study the mechanical dissipation of the fundamental mode of millimeter-sized, high quality-factor (Q) metalized silicon nitride membranes at temperatures down to 14?mK using a three-dimensional optomechanical cavity. Below 200?mK, high-Q modes of the membranes show a diverging increase of Q with decreasing temperature, reaching Q=1.27×108Q=1...journal article 2015