Electron-beam-induced deposition of 3-nm-half-pitch patterns on bulk Si

This paper demonstrates electron-beam-induced deposition of few-nm-width dense features on bulk samples by using a scanning electron-beam lithography system. To optimize the resultant features, three steps were taken: (1) features were exposed in a repetitive sequence, so as to build up the deposited features gradually across the entire pattern,...

Noise temperature and beam pattern of an NbN hot electron bolometer mixer at 5.25 THz

We report the measured sensitivities of a superconducting NbN hot electron bolometer (HEB) heterodyne receiver at 5.25 THz. Terahertz (THz) radiation is quasioptically coupled to a HEB mixer with a lens and a spiral antenna. Using a measurement setup with black body calibration sources and a beam splitter in vacuo, and an antireflection coated...