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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)To demonstrate the possibility of using EBID masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20-40 nm EBID masks, that were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine and boron trichloride can selectively etch silicon when using 20...conference paper 2015
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- Verduin, T. (author), Lokhorst, S.R. (author), Kruit, P. (author), Hagen, C.W. (author) conference paper 2015
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- Honarmand Ebrahimi, K. (author), Hagedoorn, P.L. (author), Hagen, W.R. (author) journal article 2015
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Ingolfsson, O. (author), Kumar, R. (author), Hagen, C.W. (author), Hari, S. (author)To study the potential role of low energy secondary electrons in focused electron beam induced deposition (FEBID) we have studied FEBID using 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane. While the first of these compounds shows appreciable cross sections for dissociative electron attachment (DEA) in the gas phase...journal article 2015
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride...journal article 2015
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Sevcenco, A.M. (author), Paravidino, M. (author), Vrouwenvelder, J.S. (author), Wolterbeek, H.T. (author), Van Loosdrecht, M.C.M. (author), Hagen, W.R. (author)Oxo-anion binding properties of the thermostable enzyme ferritin from Pyrococcus furiosus were characterized with radiography. Radioisotopes 32P and 76As present as oxoanions were used to measure the extent and the rate of their absorption by the ferritin. Thermostable ferritin proved to be an excellent system for rapid phosphate and arsenate...journal article 2015
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Verduin, T. (author), Kruit, P. (author), Hagen, C.W. (author)We investigated the off-line metrology for line edge roughness (LER) determination by using the discrete power spectral density (PSD). The study specifically addresses low-dose scanning electron microscopy (SEM) images in order to reduce the acquisition time and the risk of resist shrinkage. The first attempts are based on optimized elliptic...journal article 2014
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Hari, S. (author), Hagen, C.W. (author), Verduin, T. (author), Kruit, P. (author)In a first study to analyze the feasibility of electron beam-induced deposition (EBID) for creating certain patterns in advanced lithography, line patterns were fabricated on silicon wafers using EBID. The growth conditions were such that the growth rate is fully determined by the electron flux (the current limited growth regime). It is...journal article 2014
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Honarmand Ebrahimi, K. (author), Dienemann, C. (author), Hoefgens, S. (author), Than, M.E. (author), Hagedoorn, P.L. (author), Hagen, W.R. (author)The ubiquitous 24-meric iron-storage protein ferritin and multicopper oxidases such as ceruloplasmin or hephaestin catalyze oxidation of Fe(II) to Fe(III), using molecular oxygen as oxidant. The ferroxidase activity of these proteins is essential for cellular iron homeostasis. It has been reported that the amyloid precursor protein (APP) also...journal article 2013
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Hagen, W.R. (author)EPR spectroscopy employs a resonator operating at a single microwave frequency and phase-sensitive detection using modulation of the magnetic field. The X-band spectrometer is the general standard with a frequency in the 9–10 GHz range. Most (bio)molecular EPR spectra are determined by a combination of the frequency-dependent electronic Zeeman...journal article 2013
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Van Vugt-Lussenburg, B.M.A. (author), Van der Weel, L. (author), Hagen, W.R. (author), Hagedoorn, P.L. (author)Background: The highly homologous [4Fe-4S] containing fumarases FumA and FumB, sharing 90% amino acid sequence identity, from Escherichia coli are differentially regulated, which suggests a difference in their physiological function. The ratio of FumB over FumA expression levels increases by one to two orders of magnitude upon change from...journal article 2013
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Rosenberg, S.G. (author), Landheer, K. (author), Hagen, C.W. (author), Fairbrother, D.H. (author)Using three different precursors [MeCpPtMe3, Pt(PF3)4, and W(CO)6], an ultra-high vacuum surface science approach has been used to identify and rationalize the effects of substrate temperature and electron fluence on the chemical composition and bonding in films created by electron beam induced deposition (EBID). X-ray photoelectron spectroscopy...journal article 2012
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Honarmand Ebrahimi, K. (author), Hagedoorn, P.L. (author), Hagen, W.R. (author)The ?-amyloid precursor protein (APP), which is a key player in Alzheimer's disease, was recently reported to possess an Fe(II) binding site within its E2 domain which exhibits ferroxidase activity [Duce et al. 2010, Cell 142: 857]. The putative ligands of this site were compared to those in the ferroxidase site of ferritin. The activity was...journal article 2012
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Honarmand Ebrahimi, K. (author), Hagedoorn, P.L. (author), Van der Weel, L. (author), Verhaert, P.D.E.M. (author), Hagen, W.R. (author)Storage of iron in a nontoxic and bioavailable form is essential for many forms of life. Three subfamilies of the ferritin-like superfamily, namely, ferritin, bacterioferritin, and Dps (DNA-binding proteins from starved cells), are able to store iron. Although the function of these iron-storage proteins is constitutive to many organisms to...journal article 2012
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Post, P.C. (author), Mohammadi-Gheidari, A. (author), Hagen, C.W. (author), Kruit, P. (author)Lithography techniques based on electron-beam-induced processes are inherently slow compared to light lithography techniques. The authors demonstrate here that the throughput can be enhanced by a factor of 196 by using a scanning electron microscope equipped with a multibeam electron source. Using electron-beam induced deposition with MeCpPtMe3...journal article 2011
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Bevers, L.E. (author), Schwarz, G. (author), Hagen, W.R. (author)The essential trace compounds tungstate and molybdate are taken up by cells via ABC transporters. Despite their similar ionic radii and chemical properties, the WtpA protein selectively binds tungstate in the presence of molybdate. Using site-directed mutagenesis of conserved binding pocket residues, we established a molecular basis for...journal article 2011
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Van Oven, J.C. (author), Berwald, F. (author), Berggren, K.K. (author), Kruit, P. (author), Hagen, C.W. (author)This paper demonstrates electron-beam-induced deposition of few-nm-width dense features on bulk samples by using a scanning electron-beam lithography system. To optimize the resultant features, three steps were taken: (1) features were exposed in a repetitive sequence, so as to build up the deposited features gradually across the entire pattern,...journal article 2011
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Castaldo, V. (author), Withagen, J. (author), Hagen, C. (author), Kruit, P. (author), Van Veldhoven, E. (author)In recent years, novel ion sources have been designed and developed that have enabled focused ion beam machines to go beyond their use as nano-fabrication tools. Secondary electrons are usually taken to form images, for their yield is high and strongly dependent on the surface characteristics, in terms of chemical composition and topography. In...journal article 2011
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Cook, B.J. (author), Verduin, T. (author), Hagen, C.W. (author), Kruit, P. (author)Emission theory predicts that high brightness cold field emitters can enhance imaging in the electron microscope. This (neglecting chromatic aberration) is because of the large (coherent) probe current available from a high brightness source and is based on theoretically determined values of reduced brightnesses up to 1014?A/(m2?sr?V). However,...journal article 2010
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Mohammadi-Gheidari, A. (author), Hagen, C.W. (author), Kruit, P. (author)The authors present the first results obtained with their multibeam scanning electron microscope. For the first time, they were able to image 196 (array of 14×14) focused beams of a multielectron beam source on a specimen using single beam scanning electron microscope (SEM) optics. The system consists of an FEI Novanano 200 SEM optics column...journal article 2010