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Liu, Y. (author), Salemink, H.W.M. (author)
We report the results of a study of an optical sensor based on a channel-drop technique with two cascaded cavities in photonic-crystal slabs. Quality factors and intensities of the resonant modes of the sensor were analyzed with three-dimensional simulations. With the introduction of a reflector in the bus-channel and by control of the coupling...
journal article 2015
document
Liu, Y. (author), Salemink, H.W.M. (author)
A highly sensitive sensor design based on two-dimensional photonic crystal cavity is demonstrated. The geometric structure of the cavity is modified to gain a high quality factor, which enables a sensitive refractive index sensing. A group of slots with optimized parameters is created in the cavity. The existence of the slots enhances the light...
journal article 2015
document
Salemink, H.W.M. (author)
public lecture 2012
document
Liu, Y. (author), Salemink, H.W.M. (author)
In this paper we demonstrate a sensor based on a two-dimensional photonic crystal cavity structure. Design, theoretical simulations, fabrication and experiments are shown to illustrate the working principle of this device. Sensitivity of our sensor is determined by observing the shift of resonant wavelength of the photonic crystal cavity as a...
journal article 2012
document
Maas, D. (author), Van veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2010
document
Dündar, M.A. (author), Christova, C. (author), Silov, A.Y. (author), Karouta, F. (author), Nötzel, R. (author), Wienk, M. (author), Salemink, H. (author), Van der Heijden, R.W. (author)
Liquid crystal (LC, Merk 5 CB) is infiltrated into active, InAs quantum dots embedded, InGaAsP membrane type nanocavities to investigate the possible effect of the LC orientation on active cavity tuning. The tuning is demonstrated thermally and thermo-optically. The thermal tuning showed that the cavity modes can be tuned in opposite directions...
conference paper 2010
document
Chen, P. (author), Van Veldhoven, E. (author), Sanford, C.A. (author), Salemink, H.W.M. (author), Maas, D.J. (author), Smith, D.A. (author), Rack, P.D. (author), Alkemade, P.F.A. (author)
A 25 keV focused helium ion beam has been used to grow PtC nanopillars on a silicon substrate by beam-induced decomposition of a (CH3)3Pt(CPCH3) precursor gas. The ion beam diameter was about 1 nm. The observed relatively high growth rates suggest that electronic excitation is the dominant mechanism in helium ion-beam-induced deposition. Pillars...
journal article 2010
document
Van Veldhoven, E. (author), Sidorkin, V. (author), Chen, P. (author), Alkemade, P. (author), Van der Drift, E. (author), Salemink, H. (author), Zandbergen, H. (author), Maas, D. (author)
journal article 2010
document
Dündar, M.A. (author), Christova, C. (author), Silov, A.Y. (author), Karouta, F. (author), Nötzel, R. (author), Wienk, M. (author), Salemink, H. (author), Van der Heijden, R. (author)
Liquid crystal (LC, Merk 5 CB) is infiltrated into active, InAs quantum dots embedded, InGaAsP membrane type nanocavities to investigate the possible effect of the LC orientation on active cavity tuning. The tuning is demonstrated thermally and thermo-optically. The thermal tuning showed that the cavity modes can be tuned in opposite directions...
conference paper 2010
document
Nguyen, H.M. (author), Dundar, M.A. (author), Van der Heijden, R.W. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author), Rogge, S. (author), Caro, J. (author)
We demonstrate a compact silicon photonic crystal Mach-Zehnder interferometer operating in the self-collimation regime. By tailoring the photonic band structure such as to produce self-collimated beams, it is possible to design beam splitters and mirrors and combine these to a 20 × 20 ?m2 format. With transmission spectroscopy we find a...
journal article 2010
document
Nguyen, H.M. (author), Van der Drift, E.W.J.M. (author), Caro, J. (author), Rogge, S. (author), Salemink, H.W.M. (author)
conference paper 2010
document
Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
The authors report the results of investigating two models for ion-beam-induced deposition (IBID). These models describe IBID in terms of the impact of secondary electrons and of sputtered atoms, respectively. The yields of deposition, sputtering, and secondary electron emission, as well as the energy spectra of the secondary electrons were...
journal article 2009
document
Sidorkin, V.A. (author), Alkemade, P.F.A. (author), Salemink, H.W.M. (author), Schmits, R. (author), Van der Drift, E. (author)
A method for improving the aspect ratio of ultrahigh-resolution structures in negative electron-beam resist is provided for enhanced pattern-transfer capabilities. The essence of the proposed method is to form a protective “cap” on top of the resist structure by means of electron-beam-induced deposition (EBID) in a self-aligned approach. This is...
journal article 2009
document
Dündar, M.A. (author), Kicken, H.H.J.E. (author), Silov, A.Y. (author), Nötzel, R. (author), Karouta, F. (author), Salemink, H.W.M. (author), Van der Heijden, R.W. (author)
Mode-dependent shifts of resonant frequencies of cavities in liquid crystal (LC) infiltrated planar photonic crystals (PhC) are experimentally observed when the temperature is varied across the LC ordering transition. The shifts can be in opposite directions, even for two very similar nearly degenerate modes. The behavior is attributed to the...
journal article 2009
document
Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E. (author), Salemink, H.W.M. (author)
The photonic properties of two classes of wavelength-sized cavities are reported for deeply etched InP/InGaAsP/InP planar photonic crystals. The high aspect, deeply etched structures are studied as potential building blocks for nonmembrane type photonic devices in standard InP photonic integrated circuits. The first class consists of cavities of...
journal article 2009
document
Sidorkin, V. (author), Van Veldhoven, E. (author), Van der Drift, E.W.J.M. (author), Alkemade, P.F.A. (author), Salemink, H. (author), Maas, D. (author)
Scanning helium ion beam lithography is presented as a promising pattern definition technique for dense sub-10-nm structures. The powerful performance in terms of high resolution, high sensitivity, and a low proximity effect is demonstrated in a hydrogen silsesquioxane resist.
journal article 2009
document
Kicken, H.H.J.E. (author), Barbu, I. (author), Van der Heijden, R.W. (author), Karouta, F. (author), Nötzel, R. (author), Van der Drift, E.W.J.M. (author), Salemink, H.W.M. (author)
Wavelength-sized point defect cavities coupled to access waveguides are reported for deeply etched InP/InGaAsP/InP two-dimensional photonic crystals. The observed quality factor of 60 is comparable to those found for one-row defect Fabry–Perot cavities and for simple point defect cavities in membranes. The quality factor was changed by varying...
journal article 2009
document
Maas, D. (author), Van Veldhoven, E. (author), Chen, P. (author), Sidorkin, V. (author), Salemink, H. (author), Van der Drift, E. (author), Alkemade, P. (author)
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well...
conference paper 2009
document
Chen, P. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
Ion-beam-induced deposition (IBID) is a powerful technique for prototyping three-dimensional nanostructures. To study its capability for this purpose, the authors investigate the proximity effect in IBID of nanopillars. In particular, the changes in shape and dimension of pillars are studied when a second pillar is grown near an existing pillar....
journal article 2009
document
Chen, P. (author), Wu, M.Y. (author), Salemink, H.W.M. (author), Alkemade, P.F.A. (author)
We report a new method for the fabrication of sub-10 nm nanopores in a fast single process step. The pore formation is accomplished by exploiting the competition between sputtering and deposition in ion-beam-induced deposition (IBID) on a thin membrane. The pore diameter can be controlled by adjusting the ion beam and gas exposure conditions....
journal article 2008
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