Low-Loss Optomechanical Oscillator for Quantum-Optics Experiments

The extraordinary role of the AlN interlayer in growth of AlN sputtered on Ti electrodes

Characterization of low temperature deposited atomic layer deposition TiO2 for MEMS applications

Sensing performance of plasma-enhanced chemical vapor deposition SiC-SiO2-SiC horizontal slot waveguides

Enhancement of AlN Slender Piezoelectric Cantilevers Actuation by PECVD Silicon Nitride Coating

Reflectance-based two-dimensional TiO2 photonic crystal liquid sensors

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

Surface functionalisation of TiO2 evanescent waveguide sensor for E.coli monitoring

Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure

Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations

Reflectance-based Photonic Crystal Liquid Sensors Made of ALD TiO2

Method of manufacturing a micro unit and a micro unit for use in a microscope

Miniature 10 kHz thermo-optic delay line in silicon

Demonstration of PECVD SiC thermal delay lines for optical coherence tomography in the visible

Atomic layer deposition of TiO2 photonic crystal waveguide biosensors

Thermo-optical delay line for optical coherence tomography

A novel method for nanoprecision alignment in wafer bonding applications

Fly's proprioception-inspired micromachined strain-sensing structure: Idea, design, modeling and simulation, and comparison with experimental results

Simple optical characterisation for biomimetic micromachined silicon strain-sensing structure

Polarization-insensitive PECVD SiC waveguides for photonic sensing