Searched for: subject%253A%2522MEMS%2522
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Li, J. (author)
Around 10% of the population will have to go through a catheterization procedure for the treatment of a cardiovascular disease at a certain stage of their lives. During such a procedure, smart catheters will be the "eyes and ears" of the surgeons, significantly improving the diagnosis and treatment. However, there have been very limited...
doctoral thesis 2024
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Kawasaki, S. (author)
CMUTs (Capacitive Micromachined Ultrasonic Transducers) are causing a technological revolution. Research over the last decade showed that CMUTs can sufficiently replace traditional ultrasound technology based on the bulk PZT, along with other benefits such as lower assembly cost, broader bandwidth and monolithic integration capability with ASICs...
doctoral thesis 2024
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Chen, Huan (author), Zhang, Zhaoyu (author), Guo, R. (author), Han, Xutao (author), Zhang, Xuanrui (author), Lin, Junhao (author)
The gas state of the insulating gas significantly impacts the development and extent of the partial discharge (PD) in gas-insulated switchgear (GIS). Correlating these two factors allows for a more comprehensive diagnosis of insulation defects. At present, the ultrahigh-frequency (UHF) method has been widely used for PD detection in GIS. However...
journal article 2024
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)
A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...
conference paper 2023
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Liao, Z. (author), Zoumhani, O. (author), Boutry, C.M. (author)
The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility...
review 2023
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Savoia, Alessandro S. (author), Giustiniano, Domenico (author), Prelini, Carlo (author), Saccher, M. (author), Rashidi, A. (author), Leotti, Alberto (author), Giagka, Vasiliki (author), Ferrera, Marco (author)
Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and...
conference paper 2023
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Bonaldi, Michele (author), Borrielli, Antonio (author), Di Giuseppe, Giovanni (author), Malossi, Nicola (author), Morana, B. (author), Natali, Riccardo (author), Piergentili, Paolo (author), Sarro, Pasqualina M (author), Serra, E. (author), Vitali, David (author)
In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a...
journal article 2023
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Ramachandrappa Venkatesh, M. (author)
A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of...
doctoral thesis 2022
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Campos de Oliveira, A. (author), Pan, Sining (author), Wiegerink, Remco J. (author), Makinwa, K.A.A. (author)
This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...
journal article 2022
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)
During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...
journal article 2022
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Wolffenbuttel, R.F. (author), Ghaderi, M. (author)
The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large-area metasurface-based absorbers for the mid-infrared is demonstrated. The challenges are in: (a) the limited number of acceptable metals, (b) the thickness tolerance of the layers used in the CMOS process, and (c) the imaging capabilities of...
journal article 2022
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Roy, Kaustav (author), Shastri, V.U. (author), Kumar, Akshay (author), Rout, Jagi (author), Isha, Isha (author), Kalyan, Kritank (author), Prakash, Jaya (author), Pratap, Rudra (author)
We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while...
conference paper 2022
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Ye, Guigen (author), Fan, X. (author), Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author)
In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in...
journal article 2022
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How Cheah, Kean (author), Ganani, Chaggai (author), Lemmer, Kristina (author), Cervone, A. (author)
This chapter covers the development of cold gas microthruster, which is widely regarded as the simplest way of generating thrust in space, for nanosatellites. A brief background and principles of operation were given, followed by the introduction of nozzle theory that could be used in the preliminary estimation of microthruster performance...
book chapter 2022
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French, P.J. (author), Krijnen, Gijs JM (author), Vollebregt, S. (author), Mastrangeli, Massimo (author)
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...
journal article 2022
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Ahmad, T. (author), Al-Ars, Z. (author), Hofstee, H.P. (author)
Background Recently many new deep learning–based variant-calling methods like DeepVariant have emerged as more accurate compared with conventional variant-calling algorithms such as GATK HaplotypeCaller, Sterlka2, and Freebayes albeit at higher computational costs. Therefore, there is a need for more scalable and higher performance workflows of...
review 2021
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Kluba, M.M. (author), Li, J. (author), Parkkinen, Katja (author), Louwerse, Marcus (author), Snijder, Jaap (author), Dekker, R. (author)
Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity‐BOX) that contains a patterned BOX...
journal article 2021
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Tang, Adrian (author), Alonso Del Pino, M. (author), Kim, Yanghyo (author), Zhang, Yan (author), Reck, Theodore (author), Jung-Kubiak, Cecile (author), Nemchick, Deacon (author), Dyer, Logan (author), Virbila, Gabriel (author), Chattopadhyay, Goutam (author), Chang, Mau Chung Frank (author)
This paper presents an overview of a sub-orbital flight demonstration with a 183 GHz and 540–600 GHz limb-sounding instrument aboard a stratospheric ballooncraft. The 183 GHz band provides soundings of stratospheric H 2 O and is implemented with a hybrid CMOS-InP receiver architecture which provides excellent sensitivity while remaining compact ...
journal article 2021
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)
The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated...
journal article 2021
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Martins Da Ponte, R. (author), Gaio, N. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Dijkstra, Paul (author), Dekker, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)
One of the many applications of organ-on-a-chip (OOC) technology is the study of biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It is of paramount importance to construct OOCs equipped with highly compact in situ sensors that can accurately monitor, in real time, the extracellular...
journal article 2021
Searched for: subject%253A%2522MEMS%2522
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