Integration Technologies for Smart Catheters

Revitalizing CMUTs

A Novel Composite Sensor for UHF Partial Discharge and Gas State Measurement in GIS

Recent Advances in Magnetic Polymer Composites for BioMEMS: A Review

Low Noise Opto-Electro-Mechanical Modulator for RF-to-Optical Transduction in Quantum Communications

Evaluating the Influence of PMUT Mechanical Support Properties on Power Conversion Efficiency in Ultrasonically Powered Implants

High-performance wafer-scale transfer-free graphene microphones

Functional materials for MEMS based gas sensors

A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

Simulation for stability of a beam-mass based high-resolution MEMS gravimeter

Technology Development for MEMS: A Tutorial

Cold gas microthruster

Sensitive Transfer-Free Wafer-Scale Graphene Microphones

Design of large-area metasurfaces for the mid-IR and suited for CMOS-compatible fabrication by masked lithography

A PMUT based photoacoustic system as a microfluidic concentration detector

VC@Scale: Scalable and high-performance variant calling on cluster environments

Cavity‐box soi: Advanced silicon substrate with pre‐patterned box for monolithic mems fabrication

Monolithic integration of a smart temperature sensor on a modular silicon-based organ-on-a-chip device

Tunable coupling of two mechanical resonators by a graphene membrane

Multi-layer graphene Pirani pressure sensors