Single-grain Si thin-film transistors for monolithic 3D-ICs and flexible electronics

We review our recent achievements in monolithic 3D-ICs and flexible electronics based on single-grain Si TFTs that are fabricated inside a single-grain with a low-temperature process. Based on pulsed-laser crystallization and submicron sized cavities made in the substrate, amorphous-Si precursor film was converted into poly-Si having grains that...

A Methodology for Early Exploration of TSV Interconnects in 3D Stacked ICs

Planar scaling of semiconductor ICs for achieving higher integration seems to be on the brink of saturation. As an alternative solution, three-dimensional (3D) integration follows a more than Moore strategy in which circuit layers are stacked vertically. Although, 3D integration technology has moved from Lab to Fab, a complete supply chain is...

Conceptual Design of a Pick and Place Machine for 3D-IC