Proportional Microvalve Using a Unimorph Piezoelectric Microactuator

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. Polydimethylsiloxane (PDMS)-based pneumatic microvalves are commonly used but they generally require large peripheral connections that decrease portability. There are many alternatives found in the literature that use Si-based microvalves,...

A Proportionally Controlled Microvalve using a Piezoelectric Unimorph Microactuator

Microvalves are important flow-control devices in many standalone and integrated microfluidic applications. PDMS-based (Polydimethylsiloxane) pneumatic microvalves are the most commonly used type for research purposes, but they require large peripheral connections and cannot be used for controlling gases due to the high gas permeability of PDMS....

Proportional Microvalve Using A Piezoelectric Unimorph Microactuator

Microvalves are important flow-control components in many standalone and integrated microfluidic circuits. Although there is a large body of work regarding<br/>microvalves, there is still a need for an easyto-fabricate, small-footprint, low-power device that can control both liquids and gases at moderate pressures. This paper details the...