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Wnuk, J.D. (author), Gorham, J.M. (author), Rosenberg, S.G. (author), Madey, T.E. (author), Hagen, C.W. (author), Fairbrother, D.H. (author)
Focused electron beam induced processing (FEBIP) of volatile organometallic precursors has become an effective and versatile method of fabricating metal-containing nanostructures. However, the electron stimulated decomposition process responsible for the growth of these nanostructures traps much of the organic content from the precursor’s ligand...
journal article 2010
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Sidorkin, V. (author), Van der Drift, E.W.J.M. (author), Salemink, H. (author)
Performance of hydrogen silsesquioxane (HSQ) resist material with respect to the temperature during electron beam exposure was investigated. Electron beam exposure at elevated temperatures up to 90?°C shows sensitivity rise and slight contrast (?) degradation compared to lower temperature cases. Ultrahigh resolution structures formed at elevated...
journal article 2008
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Tans, S.J. (author), Miedema, R. (author), Geerligs, L.J. (author), Dekker, C. (author), Wu, J. (author), Wegner, G. (author)
journal article 1997