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Wnuk, J.D. (author), Gorham, J.M. (author), Rosenberg, S.G. (author), Madey, T.E. (author), Hagen, C.W. (author), Fairbrother, D.H. (author)
Focused electron beam induced processing (FEBIP) of volatile organometallic precursors has become an effective and versatile method of fabricating metal-containing nanostructures. However, the electron stimulated decomposition process responsible for the growth of these nanostructures traps much of the organic content from the precursor’s ligand...
journal article 2010