Searched for: subject%3A%22CMOS%255C-compatible%22
(1 - 10 of 10)
document
Wolffenbuttel, R.F. (author), Ghaderi, M. Amir (author)
Metasurface coatings on a free-standing SiN thin film membrane are fabricated on a Si substrate using masked lithography and CMOS-compatible surface micromachining. The result is a band-limited absorber for the mid-IR, which is part of a microstructure that is attached to the substrate by long and slender suspension beams to provide thermal...
journal article 2023
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Wolffenbuttel, R.F. (author), Ghaderi, M. (author)
The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large-area metasurface-based absorbers for the mid-infrared is demonstrated. The challenges are in: (a) the limited number of acceptable metals, (b) the thickness tolerance of the layers used in the CMOS process, and (c) the imaging capabilities of...
journal article 2022
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Cai, Z. (author), van Veldhoven, Robert (author), Suy, Hilco (author), de Graaf, G. (author), Makinwa, K.A.A. (author), Pertijs, M.A.P. (author)
This paper presents a readout circuit for a carbon dioxide (COࠢ) sensor that measures the CO₂-dependent thermal time constant of a hot-wire transducer. The readout circuit periodically heats up the transducer and uses a phase-domain Δ Σ modulator to digitize the phase shift of the resulting...
journal article 2018
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Schiattarella, Chiara (author), Vollebregt, S. (author), Polichetti, Tiziana (author), Alfano, Brigida (author), Massera, Ettore (author), Miglietta, Maria L. (author), Di Francia, Girolamo (author), Sarro, Pasqualina M (author)
The sp<sup>2</sup> carbon-based allotropes have been extensively exploited for the realization of gas sensors in the recent years because of their high conductivity and large specific surface area. A study on graphene that was synthetized by means of a novel transfer-free fabrication approach and is employed as sensing material is herein...
journal article 2017
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Ghaderi, M. (author)
doctoral thesis 2016
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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
In CMOS-compatible optical filter designs, SiO2 is often used as the low-index material, limiting the optical contrast (nHi/nLo) to about 2. Using the air as low-index material improves the optical contrast by about 50%, thus increasing the reflectivity and bandwidth at a given design complexity. The design and fabrication of a 4-layered air...
journal article 2014
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Aita, A.L. (author)
doctoral thesis 2011
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Emadi, A. (author), Grabarnik, S. (author), Wu, H. (author), De Graaf, G. (author), Hedsten, K. (author), Enoksson, P. (author), Correia, J.H. (author), Wolffenbuttel, R.F. (author)
This paper reports on the functional and spectral characterization of a microspectrometer based on a CMOS detector array covered by an IC-Compatible Linear Variable Optical Filter (LVOF). The Fabry-Perot LVOF is composed of 15 dielectric layers with a tapered middle cavity layer, which has been fabricated in an IC-Compatible process using resist...
conference paper 2010
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Emadi, A. (author), Wu, H. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
This paper reports on a CMOS-Compatible Linear Variable Optical Filter (LVOF) visible micro-spectrometer. The CMOS-compatible post process for fabrication of the LVOF has been used for integration of the LVOF with a CMOS chip containing a 128-element photodiode array and readout circuitry. Fabrication of LVOF involves a process for fabrication...
conference paper 2010
document
Rajaraman, V. (author), Makinwa, K.A.A. (author), French, P.J. (author)
We present a simple, flexible and low cost MEMS fabrication process, developed using deep reactive ion etching (DRIE) and wafer bonding technologies, for manufacturing in-plane high aspect ratio (HAR) inertial sensors. Among examples, the design and fabrication results of a two axis inertial device are presented. Fabricated device thickness...
conference paper 2008
Searched for: subject%3A%22CMOS%255C-compatible%22
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