Design, Production and Characterisation of an LPCVD-Based Poly-Silicon Carbide Pressure Sensor for Extreme Environments

Sensors are extremely valuable to this world. Without sensors, we would not be able to live as we do in this data-driven environment. Therefore, finding new ways to measure the matter around us is a continuous process. In this work, an addition to the new sensors is attempted, using materials that can withstand the most extreme circumstances....