- document
-
Chaturvedi, V. (author), Vogel, J.G. (author), Makinwa, K.A.A. (author), Nihtianova, S. (author)This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which...journal article 2018