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Chaturvedi, V. (author), Vogel, J.G. (author), Makinwa, K.A.A. (author), Nihtianov, S. (author)
This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which...
journal article 2018