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Wu, H. (author), Emadi, A. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
A thermopile-based detector array for use in a miniaturized Infrared (IR) spectrometer has been designed and fabricated using CMOS compatible MEMS technology. The emphasis is on the optimal of the detector array at the system level, while considering the thermal design, the dimensional constraints of a design on a chip and the CMOS compatibility...
conference paper 2010
document
Wu, H. (author), Emadi, A. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
The miniaturized IR spectrometer discussed in this paper is comprised of: slit, planar imaging diffraction grating and Thermo-Electric (TE) detector array, which is fabricated using CMOS compatible MEMS technology. The resolving power is maximized by spacing the TE elements at an as narrow as possible pitch, which is limited by processing...
conference paper 2010