Searched for: subject:"Electron%5C+beam%5C+induced%5C+deposition"
(1 - 20 of 20)
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Hari, S. (author), Trompenaars, P. H.F. (author), Mulders, J. J.L. (author), Kruit, P. (author), Hagen, C.W. (author)
High resolution dense lines patterned by focused electron beam-induced deposition (FEBID) have been demonstrated to be promising for lithography. One of the challenges is the presence of interconnecting material, which is often carbonaceous, between the lines as a result of the Gaussian line profile. We demonstrate the use of focused electron...
journal article 2021
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Mahgoub, M.I.M.A. (author), Lu, Hang (author), Thorman, Rachel M. (author), Preradovic, Konstantin (author), Jurca, Titel (author), McElwee-White, Lisa (author), Fairbrother, Howard (author), Hagen, C.W. (author)
Two platinum precursors, Pt(CO)<sub>2</sub>Cl<sub>2</sub> and Pt(CO)<sub>2</sub>Br<sub>2</sub>, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments...
journal article 2020
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Kunkels, Lorenzo (author)
Patients with orthopaedic implants often experience implant-associated infections (IAI), one of the most prominent causes for implant failure. IAIs are caused by pathogens adhering to the implant surface. One method to prevent IAIs is through the use of surface topography modifications. Cellular behaviour has been shown to be influenced by...
master thesis 2019
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Widyaratih, Dwisetya S. (author), Hagedoorn, P.L. (author), Otten, L.G. (author), Ganjian, M. (author), Tümer, N. (author), Apachitei, I. (author), Hagen, C.W. (author), Fratila-Apachitei, E.L. (author), Zadpoor, A.A. (author)
Recent discoveries have shown that nanopatterns with feature sizes ≤100 nm could direct stem cell fate or kill bacteria. These effects could be used to develop orthopedic implants with improved osseointegration and decreased chance of implant-associated infections. The quest for osteogenic and bactericidal nanopatterns is ongoing but no...
journal article 2019
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Lee, M. (author), Davidovikj, D. (author), Sajadi, B. (author), Siskins, M. (author), Alijani, F. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author)
Despite theoretical predictions that graphene should be impermeable to all gases, practical experiments on sealed graphene nanodrums show small leak rates. Thus far, the exact mechanism for this permeation has remained unclear, because different potential leakage pathways have not been studied separately. Here, we demonstrate a sealing method...
journal article 2019
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Hari, S. (author), Verduin, T. (author), Kruit, P. (author), Hagen, C.W. (author)
The potential of Electron Beam Induced Deposition (EBID) to become a reliable and reproducible direct-write nanopatterning technique has been investigated. A key requirement is that patterns of sub-20 nm dimension can be reproducibly fabricated and measured. EBID was used for the controlled fabrication of sub-20 nm dense lines on bulk silicon...
journal article 2019
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Ligeon, M.R.O. (author)
Due to competition of host and bacterial cells to adhere and grow on implant surfaces, implants are frequently associated with a high risk of peri-implant infections. The microorganisms that are abundantly present during peri-implant infections are Staphylococcus bacteria and a variety of other less abundant bacteria as for example Escherichia...
master thesis 2018
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Durrani, Z. A.K. (author), Jones, M. E. (author), Wang, C. (author), Scotuzzi, M. (author), Hagen, C.W. (author)
Nanostructures of platinum-carbon nanocomposite material have been formed by electron-beam induced deposition. These consist of nanodots and nanowires with a minimum size ∼20 nm, integrated within ∼100 nm nanogap n-type silicon-on-insulator transistor structures. The nanodot transistors use ∼20 nm Pt/C nanodots, tunnel-coupled to Pt/C...
journal article 2017
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Widyaratih, Dwisetya Safirna (author)
The presence of implants in the body is frequently associated with a high risk of peri-implant infections. The host and the bacterial cells compete to adhere and grow on the implant surface. Therefore, producing an implant that can promote the stem cells function (e.g., osteogenic differentiation) while reducing bacterial colonization is vital....
master thesis 2017
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Kosters, N.D. (author), De Hoogh, Anouk (author), Zeijlemaker, Hans (author), Acar, Hakkl (author), Rotenberg, Nir (author), Kuipers, L. (author)
We introduce core-shell plasmonic nanohelices, highly tunable structures that have a different response in the visible for circularly polarized light of opposite handedness. The glass core of the helices is fabricated using electron beam induced deposition and the pure gold shell is subsequently sputter coated. Optical measurements allow us...
journal article 2017
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Ragesh Kumar, T. P. (author), Hari, S. (author), Damodaran, Krishna K. (author), Ingólfsson, Oddur (author), Hagen, C.W. (author)
We present first experiments on electron beam induced deposition of silacyclohexane (SCH) and dichlorosilacyclohexane (DCSCH) under a focused high-energy electron beam (FEBID). We compare the deposition dynamics observed when growing pillars of high aspect ratio from these compounds and we compare the proximity effect observed for these...
journal article 2017
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using EBID masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20-40 nm EBID masks, that were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine and boron trichloride can selectively etch silicon when using 20...
conference paper 2015
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride...
journal article 2015
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Hari, S. (author), Hagen, C.W. (author), Verduin, T. (author), Kruit, P. (author)
In a first study to analyze the feasibility of electron beam-induced deposition (EBID) for creating certain patterns in advanced lithography, line patterns were fabricated on silicon wafers using EBID. The growth conditions were such that the growth rate is fully determined by the electron flux (the current limited growth regime). It is...
journal article 2014
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Wnuk, J.D. (author), Gorham, J.M. (author), Rosenberg, S.G. (author), Madey, T.E. (author), Hagen, C.W. (author), Fairbrother, D.H. (author)
Focused electron beam induced processing (FEBIP) of volatile organometallic precursors has become an effective and versatile method of fabricating metal-containing nanostructures. However, the electron stimulated decomposition process responsible for the growth of these nanostructures traps much of the organic content from the precursor’s ligand...
journal article 2010
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Botman, A.P.J.M. (author)
Electron beam induced deposition (EBID) is a novel nanofabrication technique allowing the rapid prototyping of three-dimensional nanodevices and the metallic wiring of nanostructures, and is a promising technique for many applications in nanoresearch. EBID is a process wherein a precursor molecule containing the material to be deposited is...
doctoral thesis 2009
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Van Dorp, W.F. (author), Wnuk, J.D. (author), Gorham, J.M. (author), Fairbrother, D.H. (author), Madey, T.E. (author), Hagen, C.W. (author)
The total cross section has been measured for the electron induced dissociation of trimethyl (methylcyclopentadienyl) platinum (IV) [MeCpPt(IV)Me3], a Pt precursor often used in focused electron beam induced processing (FEBIP), for incident electron energies ranging between 3–3 keV. Measurements were performed for the precursor in the adsorbed...
journal article 2009
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Van Dorp, W.F. (author)
Work started with a critical review of literature from the past 70-odd years. The review shows that the physical processes occurring in EBID are generally well understood. By combining models for electron scattering in a solid and electron beam induced heating and knowledge of growth regimes, the majority of the experimental results was...
doctoral thesis 2008
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Van Bruggen, M.J. (author)
The development of a multi-electron beam system is described which is dedicated for electron beam induced deposition (EBID) with sub-10 nm resolution. EBID is a promising mask-less nanolithography technique which has the potential to become a viable technique for the fabrication of 20-2 nm structures after 2013, as described by the International...
doctoral thesis 2008
document
Silvis-Cividjian, N. (author)
doctoral thesis 2002
Searched for: subject:"Electron%5C+beam%5C+induced%5C+deposition"
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