Searched for: subject:"Etching"
(1 - 20 of 39)

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Jeevanandam, G. (author), van der Meijden, V. (author), Birnie, L. D. (author), Kruit, P. (author), Hagen, C.W. (author)
To allow researchers to fabricate micro- and nano-devices on a small scale, without having to use complex cleanroom facilities, a single tool is proposed in which a variety of typical cleanroom techniques and processes is combined. This ‘cleanroom’ in SEM tool, based on a scanning electron microscope (SEM), integrates several add-on tools,...
journal article 2020
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Sun, Y. (author), Kang, Xuanwu (author), Zheng, Yingkui (author), Wei, Ke (author), Li, Pengfei (author), Wang, Wenbo (author), Liu, Xinyu (author), Zhang, Kouchi (author)
The optimization of mesa etch for a quasi-vertical gallium nitride (GaN) Schottky barrier diode (SBD) by inductively coupled plasma (ICP) etching was comprehensively investigated in this work, including selection of the etching mask, ICP power, radio frequency (RF) power, ratio of mixed gas, flow rate, and chamber pressure, etc. In particular...
journal article 2020
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Kumar, A. (author), Agarwal, G. (author), Petrov, R.H. (author), Goto, S. (author), Sietsma, J. (author), Herbig, M. (author)
The formation of White (WEL) and Brown Etching Layers (BEL) on rail raceways during service causes the initiation of microcracks which finally leads to failure. Detailed characterization of the WEL and the BEL in a pearlitic rail steel is carried out from micrometer to atomic scale to understand their microstructural evolution. A...
journal article 2019
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Xin, Yu (author), Pandraud, G. (author), French, P.J. (author)
In this Letter, a slope transfer method to fabricate vertical waveguide couplers is proposed. This method utilises wet etched Si as a mask, and takes advantage of dry etching selectivity between Si and SiC, to successfully transfer the profile from the Si master into SiC. By adopting this method, a <2° slope is achieved. Such a taper can...
journal article 2019
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Saxena, A.K. (author), Kumar, A. (author), Herbig, M. (author), Brinckmann, S. (author), Dehm, G. (author), Kirchlechner, C. (author)
The fracture behavior of a white etching layer formed on the rail surface in pearlitic steels during the rail-wheel contact is investigated using indentation-based microcantilever fracture tests. The sample thickness is in the order of 5 μm. The local fracture toughness of the white etching layer, its neighboring brown etching layer, martensite...
journal article 2019
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Kumar, A. (author), Saxena, A. K. (author), Kirchlechner, C. (author), Herbig, M. (author), Brinkmann, S. (author), Petrov, R.H. (author), Sietsma, J. (author)
Failure in engineering materials like steels is strongly affected by in-service deleterious alterations in their microstructure. White Etching Layers (WELs) are an example of such in-service alterations in the pearlitic microstructure at the rail surface. Cracks initiate in the rails due to delamination and fracture of these layers and...
journal article 2019
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Messaadi, M. (author), Steenbergen, M.J.M.M. (author)
This study examines the properties of stratified surface layers on rails in service and presents a hypothesis explaining their origin. The stratified layer consists of a white etching top layer and a brown sublayer. The metallurgical composition and properties of this sublayer are found to match with that of globular bainite. The occurrence...
journal article 2018
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Hammann, C.P.W. (author), Heerkens, C.T.H. (author), Hagen, C.W. (author), Zadpoor, A.A. (author), Fratila-Apachitei, E.L. (author)
Recent research evidences the strong modulatory role of controlled submicron and nanoscale topographies on stem cells fate. To harness these physical surface cues for clinical applications, fabrication of nano- and submicron patterns on clinically relevant biomaterials is greatly needed. In this study, an electron beam lithography method for...
journal article 2018
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Joshi, S. (author), Savov, A.M. (author), Shafqat, Salman (author), Dekker, R. (author)
The authors found that oxygen plasma etching of polyimide (PI) with aluminum (Al) as a hard-etch mask results in lightly textured arbitrary shaped “fur-like” residues. Upon investigation, the presence of Al was detected in these residues. Ruling out several causes of metal contamination that were already reported in literature, a new theory for...
journal article 2018
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Wu, J. (author), Petrov, R.H. (author), Kölling, S. (author), Godet, Stephane (author), Sietsma, J. (author)
Micro- to nano-scale characterization of the microstructures in the white etching layer (WEL), observed in a Dutch R260 Mn grade rail steel, was performed via various techniques. Retained austenite in the WEL was identified via electron backscatter diffraction (EBSD), automatic crystallographic orientation mapping in transmission electron...
journal article 2018
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Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), Zhang, G.Q. (author), Poelma, R.H. (author)
In this work a method is described to investigate process variations across a wafer. Through wafer MEMS spiral resonators were designed, simulated, fabricated and characterized by measuring the eigenfrequency and corresponding mode shapes. Measuring the eigenfrequency and resulting spectral behavior of resonators on different locations on the...
conference paper 2017
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Bueno Lopez, J. (author), Yurduseven, O. (author), Yates, S.J.C. (author), Llombart Juan, N. (author), Murugesan, V. (author), Thoen, D.J. (author), Baryshev, A.M. (author), Neto, A. (author), Baselmans, J.J.A. (author)
We present the design, fabrication, and full characterisation (sensitivity, beam pattern, and frequency response) of a background limited broadband antenna coupled kinetic inductance detector covering the frequency range from 1.4 to 2.8 THz. This device shows photon noise limited performance with a noise equivalent power of 2.5 × 10<sup>-19<...
journal article 2017
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Gentile, G. (author)
doctoral thesis 2016
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Steenbergen, M.J.M.M. (author)
Spalling defects of a periodic nature are sometimes observed on heat-treated pearlitic steel rails. Defect properties suggest a relationship between maintenance grinding on a regular basis and the initiation of rolling contact fatigue (RCF). In this work, the effects of maintenance grinding are investigated experimentally for both standard...
journal article 2016
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Ogundiran, MB (author), Nugteren, H.W. (author), Witkamp, G.J. (author)
Combined management of coal combustion fly ash and waste aluminium anodising etching solutions using geopolymerisation presents economic and environmental benefits. The possibility of using waste aluminium anodising etching solution (AES) as activator to produce fly ash geopolymers in place of the commonly used silicate solutions was explored...
journal article 2016
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Sokolovskij, R. (author), Sun, J. (author), Santagata, F. (author), Iervolino, E. (author), Li, S. (author), Zhang, G.Y. (author), Sarro, P.M. (author), Zhang, Kouchi (author)
A method for highly controllable etching of AlGaN/GaN for the fabrication of high sensitivity HEMT based sensors is developed. The process consists of cyclic oxidation of nitride with O<sub>2</sub> plasma using ICP-RIE etcher followed by wet etching of the oxidized layer. Previously reported cyclic oxidation-based GaN etching obtained very...
journal article 2016
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Wu, J. (author), Petrov, R.H. (author), Naeimi, M. (author), Li, Z. (author), Dollevoet, R.P.B.J. (author), Sietsma, J. (author)
White etching layer (WEL) is a frequently observed microstructural phenomenon in rail surface, formed during dynamic wheel/rail contact. It is considered as one of the main initiators for rolling contact fatigue cracks. There are several hypotheses for the formation mechanism of WEL. However, due to the complicated wheel/rail contact...
journal article 2016
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using EBID masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20-40 nm EBID masks, that were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine and boron trichloride can selectively etch silicon when using 20...
conference paper 2015
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Ghaderi, M. (author), Ayerden, N.P. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
The design and CMOS-compatible fabrication of airgap-based optical filters in a surface micromachining process with sacrificial release using thevapour phase is presented. An airgap-dielectric layer combination offers a higher refractive index contrast, as compared to the conventional all-dielectriclayer based filters, which results in a higher...
conference paper 2015
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Scotuzzi, M. (author), Kamerbeek, M.J. (author), Goodyear, A. (author), Cooke, M. (author), Hagen, C.W. (author)
To demonstrate the possibility of using electron beam-induced deposition (EBID) masks for sub-10 nm pattern transfer into silicon, first experiments were carried out by using 20- to 40-nm EBID masks, which were etched by different chemistries. It is experimentally verified that recipes based on hydrogen bromide, chlorine, and boron trichloride...
journal article 2015
Searched for: subject:"Etching"
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