Revisiting the Al/Al?O? interface: Coherent interfaces and misfit accommodation

We study the coherent and semi-coherent Al/?-Al2O3 interfaces using molecular dynamics simulations with a mixed, metallic-ionic atomistic model. For the coherent interfaces, both Al-terminated and O-terminated nonstoichiometric interfaces have been studied and their relative stability has been established. To understand the misfit accommodation...

Creating pure nanostructures from electron-beam-induced deposition using purification techniques: A technology perspective

The creation of functional nanostructures by electron-beam-induced deposition (EBID) is becoming more widespread. The benefits of the technology include fast ‘point-and-shoot’ creation of three-dimensional nanostructures at predefined locations directly within a scanning electron microscope. One significant drawback to date has been the low...

Resists for sub-20-nm electron beam lithography with a focus on HSQ: State of the art

Surface and Interface Research and Engineering Delft University of Technology: A Collection of Mini Posters