Searched for: subject%3A%22Inductively%255C+coupled%255C+plasma%255C+reactive%255C+ion%255C+etching%22
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Zhang, Zhenhua (author)
As silicon carbide(SiC) gets more and more attention from the semiconductor industry due to its robust mechanical and chemical properties, reliable and standardized processing technologies such as reactive ion etching(RIE) for SiC are in great demand. This is because of the difficulty and challenge of fabricating micro devices on the SiC...
master thesis 2023