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Ayerden, N.P. (author), Ghaderi, M. (author), De Graaf, G. (author), Wolffenbuttel, R.F. (author)
The design, fabrication and characterization of a highly integrated optical gas sensor is presented. The gas cell takes up most of the space in a microspectrometer and is the only component that has so far not been miniaturized. Using the tapered resonator cavity of a linear variable optical filter as a gas cell enables ultimate miniaturization,...
conference paper 2015