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Mohammadi-Gheidari, A. (author), Hagen, C.W. (author), Kruit, P. (author)
The authors present the first results obtained with their multibeam scanning electron microscope. For the first time, they were able to image 196 (array of 14×14) focused beams of a multielectron beam source on a specimen using single beam scanning electron microscope (SEM) optics. The system consists of an FEI Novanano 200 SEM optics column...
journal article 2010