Searched for: subject%3A%22MEMS%22
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Li, J. (author)
Around 10% of the population will have to go through a catheterization procedure for the treatment of a cardiovascular disease at a certain stage of their lives. During such a procedure, smart catheters will be the "eyes and ears" of the surgeons, significantly improving the diagnosis and treatment. However, there have been very limited...
doctoral thesis 2024
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Kawasaki, S. (author)
CMUTs (Capacitive Micromachined Ultrasonic Transducers) are causing a technological revolution. Research over the last decade showed that CMUTs can sufficiently replace traditional ultrasound technology based on the bulk PZT, along with other benefits such as lower assembly cost, broader bandwidth and monolithic integration capability with ASICs...
doctoral thesis 2024
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Wopereis, Michiel (author)
Nanomechanical resonators made of two-dimensional (2D) materials are the subject of intensive research due to their remarkable properties, allowing them to operate at high frequencies with high sensitivity. However, dissipation losses and manufacturing issues have prevented them from reaching their full potential. This thesis aims to overcome...
master thesis 2024
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Singh, Sampuran (author)
Small satellites require efficient propulsion systems for attitude and orbit control. This thesis focuses on the development and characterization of two distinct types of micro-resistojet thrusters, namely Vaporizing Liquid Micro-resistojet (VLM) and Low Pressure Micro-resistojet (LPM). Both concepts are developed at TU Delft and are designed to...
master thesis 2023
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Manjunath, Laveena (author)
Airspeed information plays a crucial role in the takeoff, flight, and landing processes in animal flyers and aerial vehicles. Among the aerial vehicles, Flapping Wing Micro Air Vehicles (FWMAVs) represent the novel engineering approach of learning and mimicking animal flyers in the past two decades. A few prototypes of various sizes and...
master thesis 2023
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Guo, Junwei (author)
MEMS microphones offer a significant scope to improve miniaturization, integration and cost of acoustic systems, poised to be the preferred microphone option for consumer electronics and medical advancements. A MEMS microphone needs a readout interface to convert the microphone’s output to a digital code for further processing, while its poor...
master thesis 2023
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PRABHAKHARAN, ASHWINRAJ (author)
Hermeticity is a measure of how well a package is leak-tight. Many Micro-Electro-Mechanical Systems (MEMS) sensors, actuators, and microelectronic devices need a defined cavity environment for optimal performance, hence measuring the package leak rate is critical for lifetime prediction. MEMS devices are generally packaged through the wafer...
master thesis 2023
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Zhang, Xinshuo (author)
Non-Destructive Testing (NDT) of infrastructures has become an increasingly prominent topic in contemporary society with great significance in terms of safety, economy and environmental protection. Acoustic Emission (AE) technology is a representative NDT technology based on passive ultrasonic guided waves, which has the advantages of large...
master thesis 2023
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Scheepstra, Jasper (author)
In a world increasingly dominated by technological advancements, the demand for high-quality microphones has never been more present. Seamless speech recognition and the development of userfriendly hearing aids remain significant challenges. State-of-the-art micro-electromechanical system (MEMS) microphones are reaching their bottlenecks in...
master thesis 2023
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van Ruiten, Cas (author)
This thesis explores the challenges of using ultrathin graphene membranes in microelectronic mechanical sensors (MEMS) technology, specifically in the development of MEMS microphones. Graphene, being only an atom thin and one of the strongest known materials, offers promising potential for further miniaturization of MEMS microphones. However,...
master thesis 2023
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Bouman, Niels (author)
Two-dimensional (membrane) materials have been receiving much scientific attention due to their unique material properties that can be used to study the smallest physical phenomena. One such material is graphene, perceived as the holy grail in material physics, due to its unique material properties. Its aspect ratio diminishes the bending...
master thesis 2023
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)
A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...
conference paper 2023
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Liao, Z. (author), Zoumhani, O. (author), Boutry, C.M. (author)
The objective of this review is to investigate the potential of functionalized magnetic polymer composites for use in electromagnetic micro-electro-mechanical systems (MEMS) for biomedical applications. The properties that make magnetic polymer composites particularly interesting for application in the biomedical field are their biocompatibility...
review 2023
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Savoia, Alessandro S. (author), Giustiniano, Domenico (author), Prelini, Carlo (author), Saccher, M. (author), Rashidi, A. (author), Leotti, Alberto (author), Giagka, Vasiliki (author), Ferrera, Marco (author)
Micromachined Ultrasonic Transducers (MUTs) are being explored as power converters in wirelessly powered biomedical implants. This paper investigates the role of mechanical support properties in piezoelectric MUTs (PMUTs) on their power conversion efficiency. For this purpose, a finite element model (FEM) of a PMUT array was developed and...
conference paper 2023
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Bonaldi, Michele (author), Borrielli, Antonio (author), Di Giuseppe, Giovanni (author), Malossi, Nicola (author), Morana, B. (author), Natali, Riccardo (author), Piergentili, Paolo (author), Sarro, Pasqualina M (author), Serra, E. (author), Vitali, David (author)
In this work, we present an Opto-Electro-Mechanical Modulator (OEMM) for RF-to-optical transduction realized via an ultra-coherent nanomembrane resonator capacitively coupled to an rf injection circuit made of a microfabricated read-out able to improve the electro-optomechanical interaction. This device configuration can be embedded in a...
journal article 2023
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Tromp, Bart (author)
Confocal microscopy is often used to make three-dimensional high-resolution images of biological samples. It is done by reflecting a laser beam off of a dichroic mirror, and focusing it on a sample with the use of a microscope. This sample is treated with a fluorescent dye. The dye molecules emit light of a higher wavelength with an intensity...
master thesis 2022
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Singh, Guru Deep (author)
The automotive industry currently has been working on developing various levels of autonomy to assist in different Advanced Driver Assistance Systems (ADAS) with the ultimate aim of moving closer to the realization of an autonomous vehicle. For such ADAS, the industry has been using multiple sensors like Cameras, Radar, LiDAR, etc. LiDAR has...
master thesis 2022
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de Heer, Izak (author)
Surface corrugations in graphene negatively effect the unique and useful properties of graphene. In order to exploit the special properties of graphene, it is therefore important to understand the phenomenon of wrinkling. In this study, strain engineering was applied to study the flattening of wrinkles in a suspended graphene membrane. Initially...
master thesis 2022
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Ramachandrappa Venkatesh, M. (author)
A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of...
doctoral thesis 2022
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French, P.J. (author), Krijnen, Gijs JM (author), Vollebregt, S. (author), Mastrangeli, Massimo (author)
Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...
journal article 2022
Searched for: subject%3A%22MEMS%22
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