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van Ruiten, Cas (author)This thesis explores the challenges of using ultrathin graphene membranes in microelectronic mechanical sensors (MEMS) technology, specifically in the development of MEMS microphones. Graphene, being only an atom thin and one of the strongest known materials, offers promising potential for further miniaturization of MEMS microphones. However,...master thesis 2023
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Bouman, Niels (author)Two-dimensional (membrane) materials have been receiving much scientific attention due to their unique material properties that can be used to study the smallest physical phenomena. One such material is graphene, perceived as the holy grail in material physics, due to its unique material properties. Its aspect ratio diminishes the bending...master thesis 2023
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene...conference paper 2023
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Tromp, Bart (author)Confocal microscopy is often used to make three-dimensional high-resolution images of biological samples. It is done by reflecting a laser beam off of a dichroic mirror, and focusing it on a sample with the use of a microscope. This sample is treated with a fluorescent dye. The dye molecules emit light of a higher wavelength with an intensity...master thesis 2022
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Singh, Guru Deep (author)The automotive industry currently has been working on developing various levels of autonomy to assist in different Advanced Driver Assistance Systems (ADAS) with the ultimate aim of moving closer to the realization of an autonomous vehicle. For such ADAS, the industry has been using multiple sensors like Cameras, Radar, LiDAR, etc. LiDAR has...master thesis 2022
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de Heer, Izak (author)Surface corrugations in graphene negatively effect the unique and useful properties of graphene. In order to exploit the special properties of graphene, it is therefore important to understand the phenomenon of wrinkling. In this study, strain engineering was applied to study the flattening of wrinkles in a suspended graphene membrane. Initially...master thesis 2022
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Ramachandrappa Venkatesh, M. (author)A MEMS gas sensor consists of a transducer, mainly a resistive or capacitive transducer coated with a thin film of specific functional materials. Functional materials can change their electrical, optical, magnetic, or mechanical properties based on the stimuli received. In a chemi-resistive or chemi-capacitive gas sensing system, thin film of...doctoral thesis 2022
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French, P.J. (author), Krijnen, Gijs JM (author), Vollebregt, S. (author), Mastrangeli, Massimo (author)Silicon sensors date back to before 1960 with early Hall and piezoresistive devices. These used simple processing that was part of the early integrated circuit (IC) industry. As the IC industry developed, silicon sensors could benefit from the technological advances. As silicon sensors advanced, there came the need for new technologies...journal article 2022
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How Cheah, Kean (author), Ganani, Chaggai (author), Lemmer, Kristina (author), Cervone, A. (author)This chapter covers the development of cold gas microthruster, which is widely regarded as the simplest way of generating thrust in space, for nanosatellites. A brief background and principles of operation were given, followed by the introduction of nozzle theory that could be used in the preliminary estimation of microthruster performance...book chapter 2022
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Campos de Oliveira, A. (author), Pan, Sining (author), Wiegerink, Remco J. (author), Makinwa, K.A.A. (author)This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...journal article 2022
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Wolffenbuttel, R.F. (author), Ghaderi, M. (author)The use of masked UV (i-line) lithography in a MEMS foundry for CMOS-compatible fabrication of large-area metasurface-based absorbers for the mid-infrared is demonstrated. The challenges are in: (a) the limited number of acceptable metals, (b) the thickness tolerance of the layers used in the CMOS process, and (c) the imaging capabilities of...journal article 2022
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Pezone, R. (author), Baglioni, G. (author), Sarro, Pasqualina M (author), Steeneken, P.G. (author), Vollebregt, S. (author)During the past decades micro-electromechanical microphones have largely taken over the market for portable devices, being produced in volumes of billions yearly. Because performance of current devices is near the physical limits, further miniaturization and improvement of microphones for mobile devices poses a major challenge that requires...journal article 2022
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Roy, Kaustav (author), Shastri, V.U. (author), Kumar, Akshay (author), Rout, Jagi (author), Isha, Isha (author), Kalyan, Kritank (author), Prakash, Jaya (author), Pratap, Rudra (author)We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while...conference paper 2022
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Ye, Guigen (author), Fan, X. (author), Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, René H. (author), Zhang, Kouchi (author)In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in...journal article 2022
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YANG, SHUHAN (author)Moisture absorbed by the hygroscopic polymers like molding compound and die-attach vaporizes during reflow lead to a high vapor pressure inside the electrical components lead to failure in the electrical device, named as popcorn failure. Popcorn failure in plastic encapsulated microcircuits has been a critical issue for electronic device...master thesis 2021
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Tang, Adrian (author), Alonso Del Pino, M. (author), Kim, Yanghyo (author), Zhang, Yan (author), Reck, Theodore (author), Jung-Kubiak, Cecile (author), Nemchick, Deacon (author), Dyer, Logan (author), Virbila, Gabriel (author), Chattopadhyay, Goutam (author), Chang, Mau Chung Frank (author)This paper presents an overview of a sub-orbital flight demonstration with a 183 GHz and 540–600 GHz limb-sounding instrument aboard a stratospheric ballooncraft. The 183 GHz band provides soundings of stratospheric H 2 O and is implemented with a hybrid CMOS-InP receiver architecture which provides excellent sensitivity while remaining compact ...journal article 2021
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Ahmad, T. (author), Al-Ars, Z. (author), Hofstee, H.P. (author)Background Recently many new deep learning–based variant-calling methods like DeepVariant have emerged as more accurate compared with conventional variant-calling algorithms such as GATK HaplotypeCaller, Sterlka2, and Freebayes albeit at higher computational costs. Therefore, there is a need for more scalable and higher performance workflows of...review 2021
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Martins Da Ponte, R. (author), Gaio, N. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Dijkstra, Paul (author), Dekker, R. (author), Serdijn, W.A. (author), Giagka, Vasiliki (author)One of the many applications of organ-on-a-chip (OOC) technology is the study of biological processes in human induced pluripotent stem cells (iPSCs) during pharmacological drug screening. It is of paramount importance to construct OOCs equipped with highly compact in situ sensors that can accurately monitor, in real time, the extracellular...journal article 2021
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Kluba, M.M. (author), Li, J. (author), Parkkinen, Katja (author), Louwerse, Marcus (author), Snijder, Jaap (author), Dekker, R. (author)Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer‐defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a novel cavity buried oxide (BOX) SOI substrate (cavity‐BOX) that contains a patterned BOX...journal article 2021
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Romijn, J. (author), Dolleman, R.J. (author), Singh, M. (author), van der Zant, H.S.J. (author), Steeneken, P.G. (author), Sarro, Pasqualina M (author), Vollebregt, S. (author)The operating principle of Pirani pressure sensors is based on the pressure dependence of a suspended strip's electrical conductivity, caused by the thermal conductance of the surrounding gas which changes the Joule heating of the strip. To realize such sensors, not only materials with high temperature dependent electrical conductivity are...journal article 2021