Measuring plastic deformation of silicon as a result of thermal oxidation

Thermal oxidation in silicon microelectromechanical systems (MEMS) induces stress in the oxide film and silicon. Such residual stresses are usually unwanted, as it can influence performance or damage components. It can also cause unwanted plastic deformation in silicon, as was observed in previous research. Currentmeasurement methods inMEMSare...

Reciprocating Geared Mechanism With Compliant Suspension

Design for specified stiffness in precision engineering

Precision engineering impacts every one, every day, by enabling the fabrication techniques and functions required for 21st technological revolutions. Various applications, from display technologies to sensor systems to optical networks make use of so called microelectromechanical systems (MEMS). Motions at micro level with monolithic structures...