Searched for: subject:"MEMS"
(1 - 20 of 78)

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Middelburg, L.M. (author)
doctoral thesis 2020
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Ouyang, B. (author)
Ultrasound sensors based on integrated photonics devices provide a new solution to meet the miniaturization demand for the detection functionality of transducers. An important example is the silicon ring-resonator (RR) ultrasound sensor developed in our department. This sensor combines a small footprint with high sensitivity and a low detection...
doctoral thesis 2020
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Sun, J. (author)
The microelectronics industry, next to the powerful, continuously scaling of integrated circuits, is currently evolving in the diversification of integrated functions, generally referred to as more than Moore (MtM). MtM concerns all technologies enabling microsystems to be elevated to a higher integration level, and with small package size,...
doctoral thesis 2020
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Zhang, B. (author)
Power electronics demand miniaturization, integration, higher electrical and ther-mal conductivities. However, the traditional electronic packaging materials and technology have limitations to meet these requirements. Conventional lead-free die attach materials, like Sn-Ag-Cu solders, can not satisfy high power electronics application, due to...
doctoral thesis 2020
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Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, P.M. (author), Zhang, Kouchi (author)
A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...
journal article 2020
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Middelburg, L.M. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Morana, B. (author), Zhang, Kouchi (author)
This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ...
journal article 2020
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Mo, J. (author), Middelburg, L.M. (author), Morana, B. (author), van Zeijl, H.W. (author), Vollebregt, S. (author), Zhang, Kouchi (author)
The application of pressure sensors in harsh environments is typically hindered by the stability of the material over long periods of time. This work focuses on the design and fabrication of surface micromachined Pirani gauges which are designed to be compatible with state-of-the-art Silicon Carbide CMOS technology. Such an integrated platform...
journal article 2020
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Ouyang, B. (author), Li, Yanlu (author), Kruidhof, Marten (author), Horsten, R.C. (author), Baets, Roel (author), van Dongen, K.W.A. (author), Caro, J. (author)
We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor...
conference paper 2020
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Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)
In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...
journal article 2020
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Li, Ming Huang (author), Lu, Ruochen (author), Manzaneque Garcia, T. (author), Gong, Songbin (author)
In this work, thin-film lithium niobate (LiNbO<sub>3</sub>) acoustic delay line (ADL) based oscillators are experimentally investigated for the first time for the application of single-mode oscillators and frequency comb generation. The design space for the ADL-based oscillator is first analyzed, illustrating that the key to low phase noise...
conference paper 2020
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Middelburg, L.M. (author), Ghaderi, Mohammadamir (author), Bilby, David (author), Visser, Jaco H. (author), Zhang, Kouchi (author), Lundgren, Per (author), Enoksson, Peter (author), Wolfenbuttel, R.F. (author)
Ensuring optical transparency over a wide spectral range of a window with a view into the tailpipe of the combustion engine, while it is exposed to the harsh environment of sootcontaining exhaust gas, is an essential pre-requisite for introducing optical techniques for long-term monitoring of automotive emissions. Therefore, a regenerable...
journal article 2020
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Kwok, Kam Sang (author), Huang, Qi (author), Mastrangeli, M. (author), Gracias, David (author)
Self-folding broadly refers to the assembly of 3D structures by bending, curving, and folding without the need for manual or mechanized intervention. Self-folding is scientifically interesting because examples of self-folded structures, from plant leaves to gut villi to cerebral gyri, abound in nature. From an engineering and technological...
journal article 2019
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Houtgast, E.J. (author)
Developments in sequencing technology have drastically reduced the cost of DNA sequencing. The raw sequencing data being generated requires processing through computationally demanding suites of bioinformatics algorithms called genomics pipelines. The greatly decreased cost of sequencing has resulted in its widespread adoption, and the amount of...
doctoral thesis 2019
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Quiros Solano, W.F. (author)
Drug development is a complex, time-consuming (10 - 15 years) and expensive process. For a new medicine to reach the market, the net expenses covered by the pharmaceutical industry have been estimated to be around $2.6 billion. Nevertheless, the risk of finding adverse effects or toxicity cases once the drug is already on the market is still...
doctoral thesis 2019
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Mountain, Christopher (author), Kluba, M.M. (author), Bergers, L.I.J.C. (author), Snijder, Jaap (author), Dekker, R. (author)
Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly software packages available only in professional manufacturing environments. It would be beneficial...
journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, P.M. (author)
Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...
journal article 2019
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Ramachandrappa Venkatesh, M. (author), Sachdeva, S. (author), El Mansouri, B. (author), Wei, J. (author), Bossche, A. (author), Bosma, D. (author), de Smet, L.C.P.M. (author), Sudholter, E.J.R. (author), Zhang, G.Q. (author)
Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...
journal article 2019
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Farhadi Machekposhti, D. (author)
Classical human-engineered transmission mechanisms such as linkages, gears, and couplings are well established designs which made out of multiple parts and rigid hinges. However, these mechanisms impose disadvantages such as wear, friction, low precision and reliability, need for assembly and lubrications, and difficulty for miniaturization. By...
doctoral thesis 2018
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de Athayde Costa e Silva, M. (author), Cordeiro Guerrieri, D. (author), Cervone, A. (author), Gill, E.K.A. (author)
CubeSats have been extensively used in the past decade as scientific tools, technology demonstrators and for education. Recently, PocketQubes have emerged as an interesting and even smaller alternative to CubeSats. However, both satellite types often lack some key capabilities, such as micropropulsion, in order to further extend the range of...
review 2018
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Martins Da Ponte, R. (author), Giagka, V. (author), Serdijn, W.A. (author)
This paper reports on the design and fabrication of a time-mode signal-processing in situ temperature sensor customized for an organ-on-a-chip (OOC) application. The circuit was fabricated using an in-house integrated circuit (IC) technology that requires only seven lithographic steps and is compatible with MEMS fabrication process. The...
conference paper 2018
Searched for: subject:"MEMS"
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