Searched for: subject:"MEMS"
(1 - 20 of 24)

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Ramachandrappa Venkatesh, M. (author), Sachdeva, S. (author), Wei, J. (author), Bossche, A. (author), Bosma, D. (author), de Smet, L.C.P.M. (author), Sudhölter, Ernst J. R. (author), Zhang, Kouchi (author)
Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...
journal article 2019
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Mountain, Christopher (author), Kluba, M.M. (author), Bergers, L.I.J.C. (author), Snijder, Jaap (author), Dekker, R. (author)
Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly software packages available only in professional manufacturing environments. It would be beneficial...
journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, P.M. (author)
Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...
journal article 2019
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Houtgast, E.J. (author), Sima, V.M. (author), Bertels, K.L.M. (author), Al-Ars, Z. (author)
We present our work on hardware accelerated genomics pipelines, using either FPGAs or GPUs to accelerate execution of BWA-MEM, a widely-used algorithm for genomic short read mapping. The mapping stage can take up to 40% of overall processing time for genomics pipelines. Our implementation offloads the Seed Extension function, one of the main...
journal article 2018
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Savov, A.M. (author), Joshi, S. (author), Shafqat, Salman (author), Hoefnagels, Johan (author), Louwerse, M.C. (author), Stoute, R. (author), Dekker, R. (author)
A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in high-density, highly stretchable electronic circuits. For an easy, damage-free handling and...
journal article 2018
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Wu, K. (author), Tichem, M. (author)
Photonic packaging, which includes high-precision assembly of photonic sub-systems, is currently a bottleneck in the development of commercially-available integrated photonic products. In the pursuit of a fully-automated, high-precision, and cost-effective photonic alignment scheme for two multi-channel photonic chips, this paper explores...
journal article 2018
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De Athayde Costa E Silva, M. (author), Cordeiro Guerrieri, D. (author), van Zeijl, H.W. (author), Cervone, A. (author), Gill, E.K.A. (author)
This paper presents the results of design, manufacturing and characterization of Vaporizing Liquid Microthrusters (VLM) with integrated molybdenum heaters and temperature sensing. The thrusters use water as the propellant and are designed for use in CubeSats and PocketQubes. The devices are manufactured using silicon based MEMS (Micro Electro...
journal article 2017
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Sajadi, B. (author), Alijani, F. (author), Goosen, J.F.L. (author), van Keulen, A. (author)
Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order...
journal article 2017
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Kokorian, J. (author), van Spengen, W.M. (author)
In this paper we demonstrate a new method for analyzing and visualizing friction force measurements of meso-scale stick–slip motion, and introduce a method for extracting two separate dissipative energy components. Using a microelectromechanical system tribometer, we execute 2 million reciprocating sliding cycles, during which we measure the...
journal article 2017
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Gkouzou, A. (author), Kokorian, J. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)
In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We...
journal article 2016
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de Laat, M.L.C. (author), Perez Garza, H.H. (author), Herder, J.L. (author), Ghatkesar, M.K. (author)
In situ stiffness adjustment in microelectromechanical systems is used in a variety of applications such as radio-frequency mechanical filters, energy harvesters, atomic force microscopy, vibration detection sensors. In this review we provide designers with an overview of existing stiffness adjustment methods, their working principle, and...
journal article 2016
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Van Spengen, W.M. (author)
In this paper a model is presented that describes the distribution of adhesion values typically experimentally observed for different MEMS devices that have been fabricated in the same way. This spread is attributed to the fact that different devices differ in the details of their surface roughness, even if these surface roughnesses are modeled...
journal article 2015
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Jiang, J. (author), Chang, Z.Y. (author), Pertijs, M.A.P. (author)
This paper presents an energy-efficient readout circuit for micro-machined resonant sensors. It operates by briefly exciting the sensor at a frequency close to its resonance frequency, after which resonance frequency and quality factor are determined from a single ring-down transient. The circuit employs an inverter-based trans-impedance...
journal article 2015
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Peters, T.J. (author), Tichem, M. (author)
This paper proposes a microfabrication process for the reliable release of SiO2 beam structures. These structures are intended to be utilized in SiO2 photonic MEMS. A major fabrication challenge is the release of thick (>10 ?m) SiO2 structures with high yield. A single mask process is developed based on temporary reinforcement of the SiO2...
journal article 2015
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Zaliasl, S (author), Salvia, JC (author), Hill, GC (author), Chen, L (author), Joo, K (author), Palwai, R (author), Arumugam, N (author), Phadke, M (author), Mukherjee, S (author), Lee, HC (author), Grosjean, C (author), Hagelin, PM (author), Pamarti, S (author), Fiez, TS (author), Makinwa, K.A.A. (author), Partridge, A (author), Menon, V (author)
This
journal article 2015
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Kokorian, J. (author), Buja, F. (author), Van Spengen, W.M. (author)
In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam...
journal article 2014
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Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...
journal article 2012
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Rajaraman, V. (author), Sabageh, I. (author), French, P. (author), Pansraud, G. (author), Cretu, E. (author)
This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and...
journal article 2011
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Estevez, P. (author), Bank, J. (author), Porta, M. (author), Wei, J. (author), Sarro, P.M. (author), Tichem, M. (author), Staufer, U. (author)
This paper presents the design, fabrication and characterization of a piezoresistive 6 Degrees of Freedom (DOF) force and torque sensor to be used in micro-manipulation. The mechanical structure of the device consists of 7 suspended beams and a calibration structure, which can be replaced by micro-manipulation tools such as micro-grippers or...
journal article 2011
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Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...
journal article 2011
Searched for: subject:"MEMS"
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