Searched for: subject:"MEMS"
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Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...
journal article 2012
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Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...
journal article 2011
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Rajaraman, V. (author), Hau, B.S. (author), Rocha, L.A. (author), French, P.J. (author), Makinwa, K.A.A. (author)
This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...
journal article 2010