Searched for: subject:"MEMS"
(1 - 3 of 3)
Dias, R.A. (author), Macedo, P.J. (author), Silva, H.D. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
A high-resolution, high dynamic range capacitive accelerometer based on pull-in time measurement is described in this paper. The high sensitivity of pull-in time can be used to implement high performance accelerometers, but non-linearity and low dynamic range compromise device performance. A closed-loop approach using an electrostatic actuation...
journal article 2012
Dias, R.A. (author), Wolffenbuttel, R.F. (author), Cretu, E. (author), Rocha, L.A. (author)
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper. An improved damper geometry with air channels was developed to address contradictory design constraints: large sensing parallel-plate area is desirable for a significant readout capacitance as well as reduced damping coefficient. Damping...
journal article 2011
Rajaraman, V. (author), Hau, B.S. (author), Rocha, L.A. (author), French, P.J. (author), Makinwa, K.A.A. (author)
This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...
journal article 2010