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Sajadi, B. (author)In the last decades, Micro-Electro-Mechanical Systems (MEMS) have drawn immense attention due to their potential use in a wide variety of modern applications, including micro-mechanical sensors and actuators. MEMS are devices combining mechanical and electrical components between 1 and 100 micrometers, all integrated into a single chip. The...doctoral thesis 2017
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Sajadi, B. (author), Alijani, F. (author), Goosen, J.F.L. (author), van Keulen, A. (author)Characterization of nonlinear behavior of micro-mechanical components in MEMS applications plays an important role in their design process. In this paper, nonlinear dynamics, stability and pull-in mechanisms of an electrically actuated circular micro-plate subjected to a differential pressure are studied. For this purpose, a reduced-order...journal article 2017