Searched for: subject:"MEMS"
(1 - 4 of 4)
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Ramachandrappa Venkatesh, M. (author), Sachdeva, S. (author), Wei, J. (author), Bossche, A. (author), Bosma, D. (author), de Smet, L.C.P.M. (author), Sudhölter, Ernst J. R. (author), Zhang, Kouchi (author)
Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...
journal article 2019
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Middelburg, L.M. (author), el Mansouri, B. (author), Poelma, R.H. (author), Zhang, G.Q. (author), van Zeijl, H.W. (author), Wei, J. (author)
This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup,...
conference paper 2018
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Estevez, P. (author), Bank, J. (author), Porta, M. (author), Wei, J. (author), Sarro, P.M. (author), Tichem, M. (author), Staufer, U. (author)
This paper presents the design, fabrication and characterization of a piezoresistive 6 Degrees of Freedom (DOF) force and torque sensor to be used in micro-manipulation. The mechanical structure of the device consists of 7 suspended beams and a calibration structure, which can be replaced by micro-manipulation tools such as micro-grippers or...
journal article 2011
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Wei, J. (author)
High-precision manipulation of small-size objects is an attractive and challenging topic for both industrial production and fundamental scientific research. The capability of monitoring micro-samples during handling is essential to the accuracy and efficiency of a handling system for both liquid and solid samples. When handling liquid samples...
doctoral thesis 2010
Searched for: subject:"MEMS"
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