Searched for: subject:"MEMS"
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Ramachandrappa Venkatesh, M. (author), Sachdeva, S. (author), El Mansouri, B. (author), Wei, J. (author), Bossche, A. (author), Bosma, D. (author), de Smet, L.C.P.M. (author), Sudholter, E.J.R. (author), Zhang, G.Q. (author)
Capacitors made of interdigitated electrodes (IDEs) as a transducer platform for the sensing of volatile organic compounds (VOCs) have advantages due to their lower power operation and fabrication using standard micro-fabrication techniques. Integrating a micro-electromechanical system (MEMS), such as a microhotplate with IDE capacitor,...
journal article 2019