Searched for: subject:"MEMS"
(1 - 1 of 1)
document
Middelburg, L.M. (author), el Mansouri, B. (author), van Zeijl, H.W. (author), Zhang, G.Q. (author), Poelma, R.H. (author)
In this work a method is described to investigate process variations across a wafer. Through wafer MEMS spiral resonators were designed, simulated, fabricated and characterized by measuring the eigenfrequency and corresponding mode shapes. Measuring the eigenfrequency and resulting spectral behavior of resonators on different locations on the...
conference paper 2017