Searched for: subject:"MEMS"
(1 - 2 of 2)
document
Sajadi, B. (author)
In the last decades, Micro-Electro-Mechanical Systems (MEMS) have drawn immense attention due to their potential use in a wide variety of modern applications, including micro-mechanical sensors and actuators. MEMS are devices combining mechanical and electrical components between 1 and 100 micrometers, all integrated into a single chip. The...
doctoral thesis 2017
document
Peters, T.J. (author), Tichem, M. (author)
This paper reports on the progress related to a multichannel photonic alignment concept, aiming for sub-micrometer precision in the alignment of the waveguides of two photonic integrated circuits (PICs). The concept consists of two steps: chip-to-chip positioning and chip bonding provide a coarse alignment after which waveguide-to-waveguide...
conference paper 2016