Searched for: subject:"MEMS"
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document
Van Leeuwen, R. (author)
In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...
doctoral thesis 2015
document
Zaal, J.J.M. (author), Van Driel, W.D. (author), Zhang, G.Q. (author)
This paper discusses the assembly challenges considering the design and manufacturability of a Wafer Level Thin Film Package in MEMS applications. The assembly processes are discussed. The loads associated with these processes are illustrated and evaluated. Numerical calculations are combined with experimental observations in order to estimate...
journal article 2010