Searched for: subject:"MEMS"
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de Graaf, G. (author), Abarca Prouza, A.N. (author), Wolfenbuttel, R.F. (author)
Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the flow dependence is based on the on-line flow compensation using two thin-film sensors on membranes in parallel on the same chip that are differentially operated. These are laterally identically, but with a different depth...
conference paper 2015