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Searched for: subject%3A%22MEMS%22
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Simple optical characterisation for biomimetic micromachined silicon strain-sensing structure
Fabrication of AlN slender piezoelectric cantilevers for highspeed MEMS actuations
A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner
Metal and Polymeric Strain Gauges for Si-based, Monolithically Fabricated Organs-on-Chips
Searched for: subject%3A%22MEMS%22
(1 - 4 of 4)
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