Searched for: subject:"MEMS"
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Wicaksono, D.H.B. (author), Pandraud, G. (author), French, P.J. (author)
This paper presents an on-going work to develop micromachined silicon-based strain sensor inspired from the campaniform sensillum of insects. We present simple optical setup for the characterisation of a membrane-in-recess structure as an early stage in mimicking the natural sensor. The microstructure is a 500 nm-thick SiO2/SiN circular membrane...
conference paper 2005