"uuid","repository link","title","author","contributor","publication year","abstract","subject topic","language","publication type","publisher","isbn","issn","patent","patent status","bibliographic note","access restriction","embargo date","faculty","department","research group","programme","project","coordinates" "uuid:255eb9be-f30c-48a3-8ba2-36c23c19d83f","http://resolver.tudelft.nl/uuid:255eb9be-f30c-48a3-8ba2-36c23c19d83f","Photonic hybrid assembly through flexible waveguides","Wörhoff, Kerstin (LioniX International BV); Prak, Albert (LioniX International BV); Postma, F. (LioniX International BV); Leinse, A (LioniX International BV); Wu, K. (TU Delft Micro and Nano Engineering); Peters, T.J. (TU Delft Micro and Nano Engineering); Tichem, M. (TU Delft Micro and Nano Engineering); Amaning-Appiah, B. (Aifotec AG); Renukappa, V. (Aifotec AG); Vollrath, G. (Aifotec AG); Balcells-Ventura, J. (IMST GmbH); Uhlig, P. (IMST GmbH); Seyfried, M. (ficonTEC Service GmbH); Rose, D. (ficonTEC Service GmbH); Santos, Raquel (Eindhoven University of Technology); Leijtens, XJM (Eindhoven University of Technology); Flintham, B. (Oclaro Technology, Inc.); Wale, M. (Oclaro Technology, Inc.); Robbins, D. (Willow Photonics, Ltd.)","Vivien, Laurent (editor); Pavesi, Lorenzo (editor); Pelli, Stefano (editor)","2016","Fully automated, high precision, cost-effective assembly technology for photonic packages remains one of the main challenges in photonic component manufacturing. Next to the cost aspect the most demanding assembly task for multiport photonic integrated circuits (PICs) is the high-precision (±0.1 μm) alignment and fixing required for optical I/O in InP PICs, even with waveguide spot size conversion. In a European research initiative - PHASTFlex - we develop and investigate an innovative, novel assembly concept, in which the waveguides in a matching TriPleX interposer PIC are released during fabrication to make them movable. After assembly of both chips by flip-chip bonding on a common carrier, TriPleX based actuators and clamping functions position and fix the flexible waveguides with the required accuracy.","Eutectic bonding; Flip-chip; InP; LTCC; MEMS; Photonic assembly; Photonic integrated circuit; TriPleX","en","conference paper","SPIE","","","","","","","","","","Micro and Nano Engineering","","",""