Searched for: subject:"MEMS"
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document
Van Spengen, W.M. (author)
In this paper a model is presented that describes the distribution of adhesion values typically experimentally observed for different MEMS devices that have been fabricated in the same way. This spread is attributed to the fact that different devices differ in the details of their surface roughness, even if these surface roughnesses are modeled...
journal article 2015
document
Kokorian, J. (author), Buja, F. (author), Van Spengen, W.M. (author)
In this paper, we present a new method for detecting in-plane displacements in microelectromechanical systems (MEMS) with an unprecedented sub-ångström accuracy. We use a curve-fitting method that is commonly employed in spectroscopy to find peak positions in a spectrum. We fit a function to the intensity profile of the image of a silicon beam...
journal article 2014