Searched for: subject:"MEMS"
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Kokorian, J. (author), van Spengen, W.M. (author)
In this paper we demonstrate a new method for analyzing and visualizing friction force measurements of meso-scale stick–slip motion, and introduce a method for extracting two separate dissipative energy components. Using a microelectromechanical system tribometer, we execute 2 million reciprocating sliding cycles, during which we measure the...
journal article 2017
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Gkouzou, A. (author), Kokorian, J. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)
In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We...
journal article 2016