- document
-
Gkouzou, A. (author), Kokorian, J. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this work, we have incorporated heaters in a MEMS device, which allow the in situ local heating of its contacting surfaces. This design offers a promising solution for MEMS devices with contacting components by preventing capillary-induced adhesion. The force of adhesion was assessed by optically measuring in-plane snap-off displacements. We...journal article 2016
- document
-
Kokorian, J. (author), van Spengen, W.M. (author)In this paper we demonstrate a new method for analyzing and visualizing friction force measurements of meso-scale stick–slip motion, and introduce a method for extracting two separate dissipative energy components. Using a microelectromechanical system tribometer, we execute 2 million reciprocating sliding cycles, during which we measure the...journal article 2017
- document
-
Gkouzou, A. (author), Janssen, G.C.A.M. (author), van Spengen, W.M. (author)In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...journal article 2020