Searched for: subject%3A%22MEMS%22
(1 - 6 of 6)
document
Verbiest, G.J. (author), Goldsche, M. (author), Sonntag, J. (author), Khodkov, T. (author), von den Driesch, N. (author), Buca, D. (author), Stampfer, C. (author)
Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we...
journal article 2021
document
Harjanto, Eric (author), van Horssen, W.T. (author), Tuwankotta, Johan M. (author)
In this paper, the oscillations of an actuated, simply supported microbeam are studied for which it is assumed that the electric load is composed of a small DC polarization voltage and a small, harmonic AC voltage. Bending stiffness and mid-plane stretching are taken into account as well as small viscous or structural damping. No tensile...
journal article 2021
document
Kwok, Kam Sang (author), Huang, Qi (author), Mastrangeli, Massimo (author), Gracias, David (author)
Self-folding broadly refers to the assembly of 3D structures by bending, curving, and folding without the need for manual or mechanized intervention. Self-folding is scientifically interesting because examples of self-folded structures, from plant leaves to gut villi to cerebral gyri, abound in nature. From an engineering and technological...
review 2019
document
Van Leeuwen, R. (author)
In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...
doctoral thesis 2015
document
Gaitas, A. (author)
This dissertation aims to advance the current state of cantilevers with integrated metal thermal and deflection sensing elements. Metallic sensing elements enable the use of alternative substrate materials (such as polymers), that tend to exhibit higher compliance properties and are more robust (less brittle) compared to Si or Si3N4 cantilevers....
doctoral thesis 2013
document
Yang, C.K. (author)
This thesis studies the effects of scaling on the characterisation and readout of micro-electro mechanical systems (MEMS) to nano-electro mechanical systems (NEMS). In particular it focuses on cantilever, which is a basic device building block and an important transducer in many sensing applications. This thesis presents an overview of major...
doctoral thesis 2012
Searched for: subject%3A%22MEMS%22
(1 - 6 of 6)