Searched for: subject:"MEMS"
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document
Vicarelli, L. (author)
doctoral thesis 2017
document
Van Leeuwen, R. (author)
In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...
doctoral thesis 2015