Searched for: subject:"MEMS"
(1 - 4 of 4)
document
Henneken, V.A. (author)
In this project, the technical feasibility of a novel assembly concept was explored, in which microsystem-based self-assembly functionality is added to an existing product. The case considered is the accurate alignment of an optical fibre relative to a telecommunication laser source. In the most demanding cases this requires alignment accuracies...
doctoral thesis 2008
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Wicaksono, D.H.B. (author)
New emerging sensing applications demand novel sensors in micro-/nano-scale to enable integration and embedding into higher level structures or systems. Downsizing the structure will usually decrease the sensitivity of the sensors, since the sensitivity is a function of geometrical parameters, e.g. mass in the case of inertial sensing, and...
doctoral thesis 2008
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Lau, G.K. (author)
Polymers can be used to constitute "artificial muscles" that actuate under an electric stimulus. These polymers include dielectric elastomers and thermally expandable polymers. They are insulating and relatively compliant. Their electric activation is enabled with integration of electrodes, heat conductors or heaters. However, the electrodes or...
doctoral thesis 2007
document
Blauw, M.A. (author)
This thesis deals with the dry etching of deep anisotropic microstructures in monocrystalline silicon by high-density plasmas. High aspect ratio trenches are necessary in the fabrication of sensitive inertial devices such as accellerometers and gyroscopes. The etching of silicon in fluorine-based plasmas is isotropic. To obtain anisotropy the...
doctoral thesis 2004
Searched for: subject:"MEMS"
(1 - 4 of 4)