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Verloop, W.A. (author)In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by...master thesis 2013
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Rajaraman, V. (author), Hau, B.S. (author), Rocha, L.A. (author), French, P.J. (author), Makinwa, K.A.A. (author)This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...journal article 2010