Resonant Air Quality Sensor

In this Thesis report the modeling, design, simulation, fabrication and measurements done at the Resonant Air Quality Sensor is described. The sensor is based on a resonant system, made in a silicon wafer with MEMS technology. By depositing the particles to be measured on top of the mass, the total mass of these particles can be measured by...

Design and Modeling of a Flexible Contact-Mode Piezoresistive Detector for Time-Based Acceleration Sensing

This work reports on the design and modeling of a new flexible contact-mode 1-DOF piezoresistive contact force and impacttime detector used for acceleration sensing in the time domain. The key advantages of the contact-mode detection mechanism are the use of simple readout circuitry, compactness, good linearity, scalability, and the potential to...