Thin-Film Lithium Niobate Acoustic Delay Line Oscillators

In this work, thin-film lithium niobate (LiNbO₃) acoustic delay line (ADL) based oscillators are experimentally investigated for the first time for the application of single-mode oscillators and frequency comb generation. The design space for the ADL-based oscillator is first analyzed, illustrating that the key to low phase noise...

Nanoscale mechanical resonators and oscillators

In this thesis the physics of nanoscale mechanical resonators and oscillators is studied. We discuss two types of resonators. First, a top-down fabricated doubly clamped beam resonator with an integrated piezoelectric actuator is introduced. The second type of resonators are based on layered two-dimensional materials, such as graphene and...

Opto-electronic MEMS oscillator for resonant pressure sensing

This thesis details the design of a self-oscillating MEMS resonator as a pressure sensor. A bi-layer circular diaphragm with a single center perforation is used as a pressure sensitive membrane which measures the absolute pressure of the surrounding medium. A novel aspect of the proposed sensor is that the resonator is made to oscillate by an...